Coriolis mass flow sensors are based on the measurement of the Coriolis forces acting on a flowing medium inside a vibrating tube. An important advantage of Coriolis mass flow sensors over other types of flow sensors is that they provide a direct measure for the mass flow, independent of fluid parameters like density, viscosity and thermal conductivity. Miniaturization of Coriolis mass flow sensors is difficult because the measured Coriolis forces are extremely small and scale down proportionally with the amount of mass flow. Thanks to microfabrication technologies, a breakthrough was achieved with the invention of an integrated micro Coriolis mass flow sensor based on a silicon nitride tube with a diameter of 80 µm and an extremely thin wall thickness of 1.3 µm, so that the mass of the tube itself is small compared to the mass of the flowing medium. While the performance of the device has been extensively explored for flows of liquids, there are still many open research questions left to improve its performance regarding flows of gases.
In the new project “Micro Coriolis mass flow sensors for gas flows”, new sensor designs and new features of the fabrication process will be explored to improve the zero stability, lower the thermal noise level, and reduce the pressure drop over the sensor. The research concentrates on the design, fabrication and characterization of a complete sensor system that can measure gas flows down to microgram per hour levels. The main challenges are (1) the design and modelling of new sensor topologies based on technologies that have not been explored before, (2) optimization of the MEMS fabrication process, (3) fabrication of the sensor chips in the MESA+ cleanroom and (4) evaluation of the resulting performance improvement in our MEMS measurement lab.
The PhD candidate will work at the Integrated Devices and Systems (IDS) group within the Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS) at the University of Twente in Enschede, the Netherlands. You will carry out the research at the University of Twente, with guidance from senior scientists and support from a senior engineer. Various teaching activities in your field of expertise may take up to 20% of your time.
Information and application
Are you interested in this position? Please send your application via the 'Apply now' button below before April 12, 2025, and include the following:
- A cover letter (maximum 2 pages A4), emphasizing your specific interest, qualifications, and motivations to apply for this position.
- A Curriculum Vitae, including a list of all courses attended and grades obtained, and, if applicable, a list of publications and references.
For more information regarding this position, you are welcome to contact dr. ir. R.J. Wiegerink at R.J.Wiegerink@utwente.nl.
About the department
The IDS group belongs to the Faculty of Electrical Engineering, Mathematics, and Computer Science. The research group studies electronic and electromechanical components and develops new concepts for nanoscale materials, devices and systems using nano- and microfabrication techniques. One ambition of the IDS group is to combine its experience in both semiconductor and MEMS technologies to design, fabricate and characterize novel smart sensing devices.
IDS contributes to the MESA+ Institute and has a strong track records in knowledge transfers to the semiconductor industry. MESA+ is the largest research institute of the University of Twente. The institute trains graduate students and PhD-students and conducts research in the fields of nanotechnology, microsystems, materials science and microelectronics. Unique of MESA+ is its multidisciplinary composition.
About the organisation
The faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS) uses mathematics, electronics and computer technology to contribute to the development of Information and Communication Technology (ICT). With ICT present in almost every device and product we use nowadays, we embrace our role as contributors to a broad range of societal activities and as pioneers of tomorrow's digital society. As part of a people-first tech university that aims to shape society, individuals and connections, our faculty works together intensively with industrial partners and researchers in the Netherlands and abroad, and conducts extensive research for external commissioning parties and funders. Our research has a high profile both in the Netherlands and internationally. It has been accommodated in three multidisciplinary UT research institutes: Mesa+ Institute, TechMed Centre and Digital Society Institute.
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